Fabrication and characterization of a Fabry-Perot-based chemical sensor

Jaeheon Han; Dean P. Neikirk; Marvin B. Clevenger; John Thomas McDevitt

doi:10.1117/12.251246

23 September 1996 Fabrication and characterization of a Fabry-Perot-based chemical sensor

Jaeheon Han, Dean P. Neikirk, Marvin B. Clevenger, John Thomas McDevitt

Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251246
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

A micromachined silicon Fabry-Perot interferometric sensor is demonstrated as an optical chemical sensor. This sensor is based on the combined nature of the amplifying and tuning characteristics of the Fabry-Perot microcavity structure and the doping effect of polymer films such as Poly(3- dodecylthiophene) (P3DDT) upon exposure to an oxidizer, in this case, iodine. The fabricated Fabry-Perot chemical sensors show reversible sensing behavior with a maximum change in transmitted optical intensity of 60%. Significant improvement of the sensing performance is obtained from the Fabry-Perot microcavity structure compared to a simple planar single membrane structure, which indicates the resonant effect of the Fabry-Perot cavity on the chemical sensor. The measured sensing characteristics suggest that the change in absorptance of P3DDT polymer inside the microcavity plays a major role, while the deflection of a microcavity membrane by the P3DDT polymer-induced surface tension gives tunability of the sensor to maximize the amplification of output response by adjusting the Fabry- Perot microcavity gap spacing.

Citation Download Citation

Jaeheon Han, Dean P. Neikirk, Marvin B. Clevenger, and John Thomas McDevitt "Fabrication and characterization of a Fabry-Perot-based chemical sensor", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); https://doi.org/10.1117/12.251246

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