Micromirror arrays for coherent beam steering and phase control

Steven C. Gustafson; Gordon R. Little; Victor M. Bright; John H. Comtois; Edward A. Watson

doi:10.1117/12.251257

23 September 1996 Micromirror arrays for coherent beam steering and phase control

Steven C. Gustafson, Gordon R. Little, Victor M. Bright, John H. Comtois, Edward A. Watson

Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251257
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

Micromirror arrays have been designed, fabricated, and tested that can steer coherent beams and that can simultaneously implement continuous phase control for beam shaping or aberration correction. A typical micromirror consists of a polysilicon plate (metalized for reflection) that is less than 100 microns in maximum dimension. Each micromirror is suspended a few microns above a polysilicon electrode by flexure hinges, and potentials of less than 50 volts applied to the electrodes displace the micromirrors over continuous ranges. Applications for arrays of these micromirrors include adaptive optics, active optical interconnections, and laser radar and communications.

Citation Download Citation

Steven C. Gustafson, Gordon R. Little, Victor M. Bright, John H. Comtois, and Edward A. Watson "Micromirror arrays for coherent beam steering and phase control", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); https://doi.org/10.1117/12.251257

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