Fabrication of LiTaO3 periodic surface structures by a single excimer laser pulse through a phase mask grating

Gui-peng Luo; Shining Zhu; Ya-Lin Lu; Yongyuan Zhu; Si-bei Xiong; Zhiguo Liu; Naiben Ming; Hai-Ming Wu; Zu-Hong Lu

doi:10.1117/12.253117

30 September 1996 Fabrication of LiTaO₃ periodic surface structures by a single excimer laser pulse through a phase mask grating

Gui-peng Luo, Shining Zhu, Ya-Lin Lu, Yongyuan Zhu, Si-bei Xiong, Zhiguo Liu, Naiben Ming, Hai-Ming Wu, Zu-Hong Lu

Author Affiliations +

Proceedings Volume 2888, Laser Processing of Materials and Industrial Applications; (1996) https://doi.org/10.1117/12.253117
Event: Photonics China '96, 1996, Beijing, China

Abstract

Surface corrugations with periodic of 2 micrometers and a depth of approximately 150 nm have been fabricated in lithium tantalate (LiTaO₃) monocrystal wafers. Morphologies of the corrugations were studied with an atomic force microscope. These corrugations were first produced by a single excimer laser pulse through a diffractive optical element, and the optical quality of the periodic structures is demonstrated by its characteristics as a gratings coupler in a LiTaO₃ planar waveguide.

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Gui-peng Luo, Shining Zhu, Ya-Lin Lu, Yongyuan Zhu, Si-bei Xiong, Zhiguo Liu, Naiben Ming, Hai-Ming Wu, and Zu-Hong Lu "Fabrication of LiTaO₃ periodic surface structures by a single excimer laser pulse through a phase mask grating", Proc. SPIE 2888, Laser Processing of Materials and Industrial Applications, (30 September 1996); https://doi.org/10.1117/12.253117

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