Laser microprojection for micromechanical device fabrication

Phil T. Rumsby; Erol C. Harvey; Dafydd T. Thomas

doi:10.1117/12.269796

20 March 1997 Laser microprojection for micromechanical device fabrication

Phil T. Rumsby, Erol C. Harvey, Dafydd T. Thomas

Proceedings Volume 2921, International Conference on Experimental Mechanics: Advances and Applications; (1997) https://doi.org/10.1117/12.269796
Event: International Conference on Experimental Mechanics: Advances and Applications, 1996, Singapore, Singapore

Abstract

Using advanced laser mask projection methods it is possible to manufacture miniature complex 3D structures in polymers and ceramics for sensor and micromechanical device prototyping or mass manufacture. Subtle movements of workpiece and mask (separately or together) during processing allow complex devices to be realized. Multilevel sensor structures can be constructed using lamination techniques. The full capabilities of laser micromachining techniques are explained in detail and an examples of novel 3D structures made by laser machining are shown.

Citation Download Citation

Phil T. Rumsby, Erol C. Harvey, and Dafydd T. Thomas "Laser microprojection for micromechanical device fabrication", Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); https://doi.org/10.1117/12.269796

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