Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect

Feiming Li; Linghui Wu; Ting Li; Michael Dubinovsky; Suning Tang; Ray T. Chen

doi:10.1117/12.271081

4 April 1997 Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect

Feiming Li, Linghui Wu, Ting Li, Michael Dubinovsky, Suning Tang, Ray T. Chen

Proceedings Volume 3005, Optoelectronic Interconnects and Packaging IV; (1997) https://doi.org/10.1117/12.271081
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We report the fabrication of tilted gratings on polyimide waveguides. The reported gratings provide an effective unidirectional surface-normal optical couple-in and couple- out for polymer-based optoelectronic interconnects. Such a planarized grating is particularly suitable for wafer-scale MCM optoelectronic interconnects due to its unique non- blocking fanout feature. both surface-normal input and output grating couplers have been demonstrated for the first time on polyimide waveguides on silicon substrate.

Citation Download Citation

Feiming Li, Linghui Wu, Ting Li, Michael Dubinovsky, Suning Tang, and Ray T. Chen "Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect", Proc. SPIE 3005, Optoelectronic Interconnects and Packaging IV, (4 April 1997); https://doi.org/10.1117/12.271081

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