Method of computer-controlled microlens processing and testing

Sergey A. Rodionov; Vadim P. Veiko; Alexander T. Shakola; Vitaly M. Domnenko; Vadim A. Patlaty

doi:10.1117/12.271428

11 April 1997 Method of computer-controlled microlens processing and testing

Sergey A. Rodionov, Vadim P. Veiko, Alexander T. Shakola, Vitaly M. Domnenko, Vadim A. Patlaty

Proceedings Volume 3008, Miniaturized Systems with Micro-Optics and Micromechanics II; (1997) https://doi.org/10.1117/12.271428
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Computer controlled process of microlens manufacturing and testing is described. Lens figuring is made by high energy CO₂ laser beam scanning over surface. Testing procedure is realized in the same installation without removal of manufactured lens. Test uses low energy He-Ne laser beam scanning over entrance pupil of lens using the same scanning system as during manufacturing procedure. Testing method is based on principles of Hartmann test but do not use any diaphragm. The least squares method is used to determine coefficients of Zernike polynomial expansion, describing testing lens surface figuring errors.

Citation Download Citation

Sergey A. Rodionov, Vadim P. Veiko, Alexander T. Shakola, Vitaly M. Domnenko, and Vadim A. Patlaty "Method of computer-controlled microlens processing and testing", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271428

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