Novel architecture for silicon-based integrated interferometer with phase modulation by elasto-optic effect

Christophe Gorecki; Franck Alexis Chollet; Hideki Kawakatsu

doi:10.1117/12.271410

11 April 1997 Novel architecture for silicon-based integrated interferometer with phase modulation by elasto-optic effect

Christophe Gorecki, Franck Alexis Chollet, Hideki Kawakatsu

Author Affiliations +

Proceedings Volume 3008, Miniaturized Systems with Micro-Optics and Micromechanics II; (1997) https://doi.org/10.1117/12.271410
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

As a novelty application of Si-based integrated optics, the preliminary results of realisation of a compact Mach-Zehnder interferometer will be presented. The deposition of a piezoelectric ZnO thin-film transducer on the reftrence arm of the interferometer will allow to transform this optically passive device in a device under an active phase modulation, useful to built a high-resolution microsensing systems with optical heterodyning.

Citation Download Citation

Christophe Gorecki, Franck Alexis Chollet, and Hideki Kawakatsu "Novel architecture for silicon-based integrated interferometer with phase modulation by elasto-optic effect", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271410

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