Stability of glass probe tips for critical dimension measurement

Joseph E. Griffith; Gabriel L. Miller; Leslie C. Hopkins; Charles E. Bryson III; E. J. Snyder; J. J. Plombon; Leonid A. Vasilyev; Jeffery B. Bindell

doi:10.1117/12.275932

7 July 1997 Stability of glass probe tips for critical dimension measurement

Joseph E. Griffith, Gabriel L. Miller, Leslie C. Hopkins, Charles E. Bryson III, E. J. Snyder, J. J. Plombon, Leonid A. Vasilyev, Jeffery B. Bindell

Author Affiliations +

Proceedings Volume 3050, Metrology, Inspection, and Process Control for Microlithography XI; (1997) https://doi.org/10.1117/12.275932
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

One of the fundamental requirements for reliable critical dimension measurement with a scanning probe microscope is stability of the stylus against flexing and against erosion. We report on the wear of an etched optical fiber when scanned across a variety of surfaces. The optical fiber probe tip was used in a novel scanning probe microscope employing a balance beam force sensor.

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Joseph E. Griffith, Gabriel L. Miller, Leslie C. Hopkins, Charles E. Bryson III, E. J. Snyder, J. J. Plombon, Leonid A. Vasilyev, and Jeffery B. Bindell "Stability of glass probe tips for critical dimension measurement", Proc. SPIE 3050, Metrology, Inspection, and Process Control for Microlithography XI, (7 July 1997); https://doi.org/10.1117/12.275932

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