Determination of anisotropic film thickness, complex reflective indices, and their dispersion from reflectance spectra

Valery N. Filippov; Vitaly P. Kutavichus

doi:10.1117/12.271838

1 April 1997 Determination of anisotropic film thickness, complex reflective indices, and their dispersion from reflectance spectra

Valery N. Filippov, Vitaly P. Kutavichus

Author Affiliations +

Proceedings Volume 3094, Polarimetry and Ellipsometry; (1997) https://doi.org/10.1117/12.271838
Event: Polarimetry and Ellipsometry, 1996, Kazimierz Dolny, Poland

Abstract

The method of envelopes and based on reflectance measurements only, is developed for investigation of uniaxial absorbing films formed on absorbing substrates. Two optical axis orientations parallel and perpendicular to the film interfaces are analyzed. Reflectance spectra for p and s linear polarizations are used to determine the complex dielectric constants of the film E_o ((lambda) ) and E_e ((lambda) ) and its thickness. For the transparent films the analytical solutions are obtained for these parameters. The simple iterative procedure are used for their determination in the case of absorbing films. Numerical model calculations are carried out to study the characteristics of the method developed. They show high stability of the real parts of E_o and h determination to the measurement error.

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Valery N. Filippov and Vitaly P. Kutavichus "Determination of anisotropic film thickness, complex reflective indices, and their dispersion from reflectance spectra", Proc. SPIE 3094, Polarimetry and Ellipsometry, (1 April 1997); https://doi.org/10.1117/12.271838

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