Hierarchical mask data design system (PROPHET) for aerial image simulation, automatic phase-shifter placement, and subpeak overlap checking

Eiji Tsujimoto; Takahiro Watanabe; Yoshio Sato; Akemi Moniwa; Yoshinobu Igarashi; Kyoji Nakajo

doi:10.1117/12.277250

28 July 1997 Hierarchical mask data design system (PROPHET) for aerial image simulation, automatic phase-shifter placement, and subpeak overlap checking

Eiji Tsujimoto, Takahiro Watanabe, Yoshio Sato, Akemi Moniwa, Yoshinobu Igarashi, Kyoji Nakajo

Author Affiliations +

Proceedings Volume 3096, Photomask and X-Ray Mask Technology IV; (1997) https://doi.org/10.1117/12.277250
Event: Photomask Japan '97, 1997, Kawasaki City, Japan

Abstract

A hierarchical and interactive mask data design system (PROPHET) has been developed for aerial image simulation, fast subpeak overlap checking of adjacent patterns in attenuated phase-shifting masks, and automatic phase-shifter placement. This system, linked with a layout editor through an added-on menu, allows the designer to perform layout while concurrently considering mask data, taking into account design restrictions imposed by ultra-high resolution technology.

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Eiji Tsujimoto, Takahiro Watanabe, Yoshio Sato, Akemi Moniwa, Yoshinobu Igarashi, and Kyoji Nakajo "Hierarchical mask data design system (PROPHET) for aerial image simulation, automatic phase-shifter placement, and subpeak overlap checking", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); https://doi.org/10.1117/12.277250

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