Design, fabrication, and testing of micro-optical components for sensors and microsystems

Reinhard Voelkel; Philippe Nussbaum; Jean-Christophe Roulet; Peter Blattner; Kenneth J. Weible; Hans Peter Herzig

doi:10.1117/12.281227

24 September 1997 Design, fabrication, and testing of micro-optical components for sensors and microsystems

Reinhard Voelkel, Philippe Nussbaum, Jean-Christophe Roulet, Peter Blattner, Kenneth J. Weible, Hans Peter Herzig

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281227
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

We report on our activities in the design, fabrication, characterization and system integration of planar micro- optical elements. Microlens arrays, gratings, diffusers, beam shapers and beam splitters have been fabricated, tested and integrated in chemical analysis systems ((mu) TAS, fluorescence detection), tracking sensors for satellites, displacement sensors, optical lightpipes, LCD projector illumination photospectrometers, neural networks and multiple channel imaging systems for photolithography. Packaging and alignment strategies for sensors and optical microsystems were investigated.

Citation Download Citation

Reinhard Voelkel, Philippe Nussbaum, Jean-Christophe Roulet, Peter Blattner, Kenneth J. Weible, and Hans Peter Herzig "Design, fabrication, and testing of micro-optical components for sensors and microsystems", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281227

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