CMOS binary position-sensitive photodetector (PSD) array

Anssi Jaakko Maekynen; Timo E. Rahkonen; Juha Tapio Kostamovaara

doi:10.1117/12.287730

25 September 1997 CMOS binary position-sensitive photodetector (PSD) array

Anssi Jaakko Maekynen, Timo E. Rahkonen, Juha Tapio Kostamovaara

Proceedings Volume 3100, Sensors, Sensor Systems, and Sensor Data Processing; (1997) https://doi.org/10.1117/12.287730
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

The implementation and test results of a 16 by 16 binary CMOS photodetector array for position sensing applications are presented. Unlike conventional position sensitive detectors (PSDs), it can be used for simultaneous multiple spot detection with high accuracy. To decrease the signal processing overhead characteristic of this kind of area arrays, binary detection and random access readout is used. The fill factor and pitch of the array are 30% and 50 micrometers , respectively. Spatial quantization limited position sensing accuracy of 4.3 micrometers is achieved using a uniform spot of 280 micrometers in diameter, total signal power of about 8 nW and pulse width of 8 ms. At lower signal levels, the accuracy is decreased by the spatial noise caused by the nonuniformity of the threshold currents. The array outperforms a typical large-area (approximately 100 mm²) lateral effect PSD (LEP) when a measurement bandwidth smaller than 10 kHz is used.

Citation Download Citation

Anssi Jaakko Maekynen, Timo E. Rahkonen, and Juha Tapio Kostamovaara "CMOS binary position-sensitive photodetector (PSD) array", Proc. SPIE 3100, Sensors, Sensor Systems, and Sensor Data Processing, (25 September 1997); https://doi.org/10.1117/12.287730

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