Beam delivery focusing objectives for excimer laser micromachining applications

Mark Percevault; Donald K. Wilson

doi:10.1117/12.281353

22 September 1997 Beam delivery focusing objectives for excimer laser micromachining applications

Mark Percevault, Donald K. Wilson

Proceedings Volume 3110, 10th Meeting on Optical Engineering in Israel; (1997) https://doi.org/10.1117/12.281353
Event: 10th Meeting on Optical Engineering in Israel, 1997, Jerusalem, Israel

Abstract

Although the use of UV excimer lasers in photo-ablation and exposure applications is becoming more frequent, optical objectives for such applications are not widely available. In addition, high power UV excimer laser radiation limits the optical designer's choice of suitable materials and other design options when designing the beam delivery focusing objective. Now, however, a line of UV achromatic focusing objectives has been designed for photo-ablation applications. Thoroughly tested in the field, they are available as off-the- shelf standard components. Data are presented below on focal spot sizes, energy densities, and other focal characteristics for specific applications.

Citation Download Citation

Mark Percevault and Donald K. Wilson "Beam delivery focusing objectives for excimer laser micromachining applications", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); https://doi.org/10.1117/12.281353

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