Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region

Angela Duparre; Stefan Jakobs; Norbert Kaiser

doi:10.1117/12.281375

22 September 1997 Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region

Angela Duparre, Stefan Jakobs, Norbert Kaiser

Author Affiliations +

Proceedings Volume 3110, 10th Meeting on Optical Engineering in Israel; (1997) https://doi.org/10.1117/12.281375
Event: 10th Meeting on Optical Engineering in Israel, 1997, Jerusalem, Israel

Abstract

Effects of defect propagation from the substrate throughout thin film single layer and multilayer coatings are investigated on fluoride and oxide films evaporated onto different types of substrates. Atomic force microscopy, light scattering methods, and transmission electron microscopy are used to study the surface morphology of the coated and uncoated substrates. With fluoride films, propagation of rough substrate structures is observed for both single layer films and multilayers. Oxide coatings replicate the microtopography even of well polished surfaces and throughout thick multilayer stacks.

Citation Download Citation

Angela Duparre, Stefan Jakobs, and Norbert Kaiser "Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); https://doi.org/10.1117/12.281375

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available