Surface feature investigation using the optically measured sliding window spectrum

Michael Friedmann; Joseph Shamir

doi:10.1117/12.281334

22 September 1997 Surface feature investigation using the optically measured sliding window spectrum

Michael Friedmann, Joseph Shamir

Proceedings Volume 3110, 10th Meeting on Optical Engineering in Israel; (1997) https://doi.org/10.1117/12.281334
Event: 10th Meeting on Optical Engineering in Israel, 1997, Jerusalem, Israel

Abstract

In this work we present a method to investigate surface features based on the scanning of a focused beam over the surface and the interpretation of far field data. It is shown that the measured data is the sliding window spectrum (SWS) of the surface. Inspection of the SWS can be used to identify different surface features, and to perform high precision measurements for certain surface structures. By sampling adequately the SWS we measure the amplitude of the surface Gabor expansion coefficients and build the Gabor diagram. A projection onto constraint sets (POCS) algorithm is used to reconstruct the surface from the Gabor diagram. The constraints are provided by the physical characteristics of the surface and by the far field measurements. The projections between the constraint sets are implemented using the Gabor transform theory. Computer simulations and experimental results show that this method can reconstruct accurately shallow phase objects.

Citation Download Citation

Michael Friedmann and Joseph Shamir "Surface feature investigation using the optically measured sliding window spectrum", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); https://doi.org/10.1117/12.281334

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