Paper
1 November 1997 Metrology laboratory requirements for third-generation synchrotron radiation sources
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Abstract
New third-generation synchrotron radiation sources that are now, or will soon, come on line will need to decide how to handle the testing of optical components delivered for use in their beam lines. In many cases it is desirable to establish an in-house metrology laboratory to do the work. We review the history behind the formation of the Optical Metrology Laboratory at Brookhaven National Laboratory and the rationale for its continued existence. We offer suggestions to those who may be contemplating setting up similar facilities, based on our experiences over the past two decades.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Z. Takacs and Shinan Qian "Metrology laboratory requirements for third-generation synchrotron radiation sources", Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997); https://doi.org/10.1117/12.295555
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Cited by 1 scholarly publication.
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KEYWORDS
Mirrors

Metrology

Optical metrology

Optical components

Synchrotron radiation

Atomic force microscopy

Optics manufacturing

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