Comparison of submicron particle counting and sizing results from different sensors in semiconductor process chemicals

Dumitru Gh. Ulieru

doi:10.1117/12.284648

25 August 1997 Comparison of submicron particle counting and sizing results from different sensors in semiconductor process chemicals

Dumitru Gh. Ulieru

Author Affiliations +

Proceedings Volume 3213, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III; (1997) https://doi.org/10.1117/12.284648
Event: Microelectronic Manufacturing, 1997, Austin, TX, United States

Abstract

The measurement of particle size and concentration in Di-water and various chemicals has permitted us to verify the performance of more high sensitivity sensors. The size of these particles have been determined by specialized instrumentation. The paper presents the comparison results of sizing accuracy and concentration measurement for ultrapure liquids. The results of sizing accuracy as shown for sensors due of light scattering for latex spheres in Di and silicon spheres in chemicals. The concentration measurement (particles/100 ml) made with more sensors against factor leads to identify which sensors are sensitive in Di water and which in chemicals and permit the measurement of their sensitivity and the counting efficiency too. The study permitted the best results for measurement of Di and ultrapure chemicals for particle counting and sizing recommended for all minielectronics fabs.

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Dumitru Gh. Ulieru "Comparison of submicron particle counting and sizing results from different sensors in semiconductor process chemicals", Proc. SPIE 3213, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III, (25 August 1997); https://doi.org/10.1117/12.284648

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