Balance approach for mechanical properties test of microfabricated structures

Xingguo Xiong; Qiang Zou; Deren Lu; Weiyuan Wang

doi:10.1117/12.284493

5 September 1997 Balance approach for mechanical properties test of microfabricated structures

Xingguo Xiong, Qiang Zou, Deren Lu, Weiyuan Wang

Proceedings Volume 3223, Micromachining and Microfabrication Process Technology III; (1997) https://doi.org/10.1117/12.284493
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

A simple and effective method using a balance to measure micro force and corresponding deflection is presented. The method is proved to be very practical in testing the force-deflection behavior of silicon cantilever, in which the Young's modulus of the material can be calculated, and in investigating the static performance of bulk micromachined capacitive accelerometers. The balance approach for micro force- displacement measurement is very attractive for its easiness in operation, low cost and higher resolution.

Citation Download Citation

Xingguo Xiong, Qiang Zou, Deren Lu, and Weiyuan Wang "Balance approach for mechanical properties test of microfabricated structures", Proc. SPIE 3223, Micromachining and Microfabrication Process Technology III, (5 September 1997); https://doi.org/10.1117/12.284493

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