Computer modeling techniques applied to pneumatically driven micropumps

In-Byeong Kang; Noel D. Samaan; Malcolm R. Haskard; Namsoo Kim

doi:10.1117/12.284522

5 September 1997 Computer modeling techniques applied to pneumatically driven micropumps

In-Byeong Kang, Noel D. Samaan, Malcolm R. Haskard, Namsoo Kim

Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284522
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

In this paper, an analytical approach based on the energy relationship between microcomponents has been applied to derive the characteristics of a square diaphragm silicon micropump to consider its nonlinear effects. The methodology caters for all relevant energy terms corresponding to the stiffness of the diaphragm including bending, tensile, stretch forces, the mass of the diaphragm, and of the air in the vicinity of diaphragm. The stiffness of the pump chamber and the input/output tube, the fluidic mass and the frictional losses of the input/output tube are also incorporated in the model. Equivalent electrical circuit is derived to calculate the lumped parameters using the energy expressions. The approach is applied to the pneumatically driven micropump.

Citation Download Citation

In-Byeong Kang, Noel D. Samaan, Malcolm R. Haskard, and Namsoo Kim "Computer modeling techniques applied to pneumatically driven micropumps", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284522

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available