Routes to failure in rotating MEMS devices experiencing sliding friction

Samuel L. Miller; Glen LaVigne; M. Steven Rodgers; Jeffry J. Sniegowski; J. P. Waters; Paul J. McWhorter

doi:10.1117/12.284523

5 September 1997 Routes to failure in rotating MEMS devices experiencing sliding friction

Samuel L. Miller, Glen LaVigne, M. Steven Rodgers, Jeffry J. Sniegowski, J. P. Waters, Paul J. McWhorter

Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284523
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

Gear systems rotating on hubs have been operated to failure using Sandia's microengine as the actuation device. Conventional failure modes such as fatigue induced fracture did not occur, indicating that the devices are mechanically extremely robust. The generic route to failure observed for all rotating devices involves sticking of structures that are in sliding contact. This sticking evidently results from microscopic changes in the sliding surfaces during operation. The rate at which these changes occur is accelerated by excessive applied forces, which originate from non-optimized designs or inappropriate drive voltages. Precursors to failure are observed, enabling further understanding of the microscopic changes that occur in the sliding surfaces that ultimately led to failure.

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Samuel L. Miller, Glen LaVigne, M. Steven Rodgers, Jeffry J. Sniegowski, J. P. Waters, and Paul J. McWhorter "Routes to failure in rotating MEMS devices experiencing sliding friction", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284523

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Microelectromechanical systems

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