Silicon micromachined vibrating gyroscopes

Ralf Voss

doi:10.1117/12.284541

5 September 1997 Silicon micromachined vibrating gyroscopes

Ralf Voss

Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284541
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

This work gives an overview of silicon micromachined vibrating gyroscopes. Market perspectives and fields of application are pointed out. The advantage of using silicon micromachining is discussed and estimations of the desired performance, especially for automobiles are given. The general principle of vibrating gyroscopes is explained. Vibrating silicon gyroscopes can be divided into seven classes. for each class the characteristic principle is presented and examples are given. Finally a specific sensor, based on a tuning fork for automotive applications with a sensitivity of 250(mu) V/degrees is described in detail.

Citation Download Citation

Ralf Voss "Silicon micromachined vibrating gyroscopes", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284541

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