Real-time and multichannel signal abstraction for piezoelectric resonant sensor array

Ping Li; Yumei Wen

doi:10.1117/12.293561

14 November 1997 Real-time and multichannel signal abstraction for piezoelectric resonant sensor array

Ping Li, Yumei Wen

Proceedings Volume 3242, Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.293561
Event: Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS, 1997, Adelaide, Australia

Abstract

This paper introduces a new principle of no-scanning tactile resonant sensor array. All sensory elements in this sensor array form independent oscillators which ave different resonant frequency because of the fabrication of different thickness on electrodes and the special resonant circuits connected with them. Once a pressure or force is applied on the surface of piezoelectric plane, the resonant frequencies in the application area will change along with diversity of the applied pressure or force quickly. The resonant frequencies in the application area will change along with diversity of the applied pressure or force quickly. The resonant frequencies in the application area will change along with diversity of the applied pressure or force quickly. The resonant signals in all sensor elements are taken out from parallel output lines continuously. Since only the data which have designated meaning are processed, thus the data are compressed and a real-time sensing system may be obtained. The output of the array is quasidigital signal and can be processed in a digital way easily, its antijam is well. The sensor array contains two functional units: the sensory unit, the signal generating and processing unit, which can be integrated or be wired together easily. So the sensor array may be feasible for both large dimensions sensing and perception of fine object.

Citation Download Citation

Ping Li and Yumei Wen "Real-time and multichannel signal abstraction for piezoelectric resonant sensor array", Proc. SPIE 3242, Smart Electronics and MEMS, (14 November 1997); https://doi.org/10.1117/12.293561

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KEYWORDS

Sensors

Electrodes

Quartz

Signal processing

Wave propagation

Resonators

Semiconducting wafers

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