Continuous Coating Of Indium Tin Oxide Onto Large Area Flexible Substrates

W. C. Kittler Jr.; I. T. Ritchie

doi:10.1117/12.933287

29 April 1982 Continuous Coating Of Indium Tin Oxide Onto Large Area Flexible Substrates

W. C. Kittler Jr., I. T. Ritchie

Proceedings Volume 0325, Optical Thin Films; (1982) https://doi.org/10.1117/12.933287
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

A process is described for the continuous coating of rolls of flexible material up to 36" wide with a transparent electrically conductive layer of indium tin oxide. These coatings are produced by either direct sputtering or by reactive magnetron sputtering from a metal alloy target. The latter process is preferred from a cost standpoint. Coatings are available with visible light transmittances and electrical resistances ranging from greater than 0.8 and less than 100Ω/□ to 0.9 and greater than 1MΩ/□ respectively. A variety of substrates, such as polyester, Teflon, Kapton, polycarbonate can be coated. Uses of these coatings range from use in transparent touch panels to static drains and heat mirrors. Several of these applications are discussed briefly.

Citation Download Citation

W. C. Kittler Jr. and I. T. Ritchie "Continuous Coating Of Indium Tin Oxide Onto Large Area Flexible Substrates", Proc. SPIE 0325, Optical Thin Films, (29 April 1982); https://doi.org/10.1117/12.933287

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