Diagnostic techniques for excimer beams used in a-Si annealing for flat panel displays

Gary T. Forrest

doi:10.1117/12.309527

3 June 1998 Diagnostic techniques for excimer beams used in a-Si annealing for flat panel displays

Gary T. Forrest

Proceedings Volume 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III; (1998) https://doi.org/10.1117/12.309527
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

Laser annealing of a-Si to form p-Si LCD panels requires precise control of the annealing beam shape and scan overlap. Three methods are presented for determining the annealed quality of a-Si LCD panels. The first tests the laser beam directly by using polymer coated 8 X 10 inch SensorCards. The second allows live viewing of the beam in real time with a fluorescent glass. The third looks directly at the optical properties of the annealed a-Si to infer eventual electrical properties.

Citation Download Citation

Gary T. Forrest "Diagnostic techniques for excimer beams used in a-Si annealing for flat panel displays", Proc. SPIE 3274, Laser Applications in Microelectronic and Optoelectronic Manufacturing III, (3 June 1998); https://doi.org/10.1117/12.309527

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