High-aspect-ratio microstructure-covered sheets: fabrication and function

Kevin W. Kelly; Christophe Marques; James G. Rogers IV; Mircea S. Despa; John R. Collier

doi:10.1117/12.320193

20 July 1998 High-aspect-ratio microstructure-covered sheets: fabrication and function

Kevin W. Kelly, Christophe Marques, James G. Rogers IV, Mircea S. Despa, John R. Collier

Proceedings Volume 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS; (1998) https://doi.org/10.1117/12.320193
Event: 5th Annual International Symposium on Smart Structures and Materials, 1998, San Diego, CA, United States

Abstract

The LIGA process is being further developed to fabricate large surfaces covered with high aspect ratio microstructures (HARMs). A HARM is defined as a structure hundreds of micrometers in height and with a height and with a height/characteristic lateral dimension which is five or greater. The molding step of the LIGA process provides one method to rapidly and inexpensively fabricate HARM-covered sheets. Molding experiments were performed to determine combinations of processing parameters which produce high quality, high density polyethylene HARMs. In addition to developing an inexpensive process to manufacture HARMs, uses for HARM-covered sheets are being investigated. One example is heat transfer enhancement. Microfins were added to the surface of a cylinder and experiments quantified their effect on the rate of convective heat transfer for a cylinder in crossflow.

Citation Download Citation

Kevin W. Kelly, Christophe Marques, James G. Rogers IV, Mircea S. Despa, and John R. Collier "High-aspect-ratio microstructure-covered sheets: fabrication and function", Proc. SPIE 3328, Smart Structures and Materials 1998: Smart Electronics and MEMS, (20 July 1998); https://doi.org/10.1117/12.320193

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