Materials for reflective multilayer coatings for EUV wavelengths

Bruce W. Smith; Parthasarathy Venkataraman; Santosh K. Kurinec; R. Scott Mackay

doi:10.1117/12.309614

5 June 1998 Materials for reflective multilayer coatings for EUV wavelengths

Bruce W. Smith, Parthasarathy Venkataraman, Santosh K. Kurinec, R. Scott Mackay

Proceedings Volume 3331, Emerging Lithographic Technologies II; (1998) https://doi.org/10.1117/12.309614
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

By operating at wavelength near 10-20 nm, EUV lithography can allow for imaging below 100 nm with limited diffractive losses. The reflective optics involved in such systems require multilayer coatings with stringent demands on throughput, uniformity, and stability. The performance of such multilayers is dependent on the optical properties leading to multilayer stacks requiring up to 40 layer pairs. An exhaustive study of potential material combinations has been performed. Detailed results from the investigation of candidate EUV reflective multilayers is presented. Beryllium and silicon are unique in the 10 to 20 nm wavelength range as materials with high index values and suitably low absorption. The best performing coatings within this range are therefore combinations of these two materials with low absorbing low index films, including many refractory metals. For each multilayer coating type investigated, the wavelength of maximum reflectivity has been optimized, and stress, thickness variation, scattering, and interfacial layer formation effects have been characterized.

Citation Download Citation

Bruce W. Smith, Parthasarathy Venkataraman, Santosh K. Kurinec, and R. Scott Mackay "Materials for reflective multilayer coatings for EUV wavelengths", Proc. SPIE 3331, Emerging Lithographic Technologies II, (5 June 1998); https://doi.org/10.1117/12.309614

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available