Structure investigations of optical coatings on GaAs substrate

Clementina A. Timus; Victor Rares Medianu; Rares V. Medianu; Geo Georgescu; Eugen Vasile

doi:10.1117/12.312726

2 July 1998 Structure investigations of optical coatings on GaAs substrate

Clementina A. Timus, Victor Rares Medianu, Rares V. Medianu, Geo Georgescu, Eugen Vasile

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312726
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

ZnS, BaF₂ and GaAs thin films on NaCl and GaAs substrates, produced by thermal evaporation and r.f. magnetron sputtering as antireflective and reflective coatings for 10.6 micrometers are investigated. Optical and electronic microscopy (TEM and SEM) with EDAX and SAED had been approached to study the structure and morphology of optical coatings, corroborated with the technological parameters of the deposition. The columnar structure of the thermally evaporated BaF₂ film was observed. Uniformity and deposition rate for r.f. magnetron sputtering deposition, without ion assistance turns out to be very critical, since the induced mechanical stresses could compromise the optical film.

Citation Download Citation

Clementina A. Timus, Victor Rares Medianu, Rares V. Medianu, Geo Georgescu, and Eugen Vasile "Structure investigations of optical coatings on GaAs substrate", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312726

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