Multiwavelength ATR reflectometry of thin films

A. Hoffmann; Norbert Kroo; Z. Lenkefi; Zsolt Szentirmay

doi:10.1117/12.323321

29 September 1998 Multiwavelength ATR reflectometry of thin films

A. Hoffmann, Norbert Kroo, Z. Lenkefi, Zsolt Szentirmay

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323321
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Optical parameters of metallic and non-metallic thin films (complex dielectric function and the thickness) can be determined by measurement of the attenuated total reflection (ATR) of light. In this method the first layer should be a surface-plasmon-carrying metal film as e.g. silver or gold, while the 100 - 200 angstrom thick adlayers could be both metallic or non-metallic. The basic unit of our newly developed multichannel reflectometer is a conventional ATR reflectometer, working in the Kretschmann geometry. The light source is a white lamp unit and the analysis of the reflected beam is performed using an OMA-4 multichannel optical analyzer. This instrument makes possible the determination of the angular distribution of reflectance of thin film samples in the 400 - 900 nm wavelength range in one cycle.

Citation Download Citation

A. Hoffmann, Norbert Kroo, Z. Lenkefi, and Zsolt Szentirmay "Multiwavelength ATR reflectometry of thin films", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323321

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