Geometry versus optical performance of micromirrors and arrays

M. Adrian Michalicek; John H. Comtois; Heather K. Schriner

doi:10.1117/12.326690

13 October 1998 Geometry versus optical performance of micromirrors and arrays

M. Adrian Michalicek, John H. Comtois, Heather K. Schriner

Proceedings Volume 3440, Photonics for Space Environments VI; (1998) https://doi.org/10.1117/12.326690
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

This paper describes the design, fabrication, surface characterization, and adaptive optics simulation of advanced surface micromachined micromirror devices. Design considerations and fabrication capabilities are presented. Various shapes and array distributions of unique Flexure- Beam Micromirror Devices are simulated for adaptive optics performance against several typical optical aberrations. These devices are fabricated in the state-of-the-art, four- level, planarized, ultra-low-stress polysilicon process available at Sandia National Laboratories known as the Sandia Ultra-planar Multi-level MEMS Technology (SUMMiT). This enabling process permits the development of micromirror devices with near-ideal characteristics that have previously been unrealizable in standard three-layer polysilicon processes. The advanced capabilities of this process along with customized layout tools have permitted the fabrication of highly advanced and often irregular shapes of mirror surfaces that can be uniquely distributed to minimize wavefront error across the pupil.

Citation Download Citation

M. Adrian Michalicek, John H. Comtois, and Heather K. Schriner "Geometry versus optical performance of micromirrors and arrays", Proc. SPIE 3440, Photonics for Space Environments VI, (13 October 1998); https://doi.org/10.1117/12.326690

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