Phase correction in measurement of gauge blocks using a new double-ended interferometer

Yasushi Ishii

doi:10.1117/12.323106

30 September 1998 Phase correction in measurement of gauge blocks using a new double-ended interferometer

Yasushi Ishii

Proceedings Volume 3477, Recent Developments in Optical Gauge Block Metrology; (1998) https://doi.org/10.1117/12.323106
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Phase correction in measured lengths of gauge blocks was researched. It has been known that the phase correction depends on the surface roughens of the gauge and the shift of the effective plane of reflection caused by penetration, due to the complex refractive index.

Citation Download Citation

Yasushi Ishii "Phase correction in measurement of gauge blocks using a new double-ended interferometer", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323106

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