Basic approaches for metal-induced oxide charge on silicon wafer surfaces studied by AC surface photovoltage techniques

Hirofumi Shimizu; Chusuke Munakata

doi:10.1117/12.324397

27 August 1998 Basic approaches for metal-induced oxide charge on silicon wafer surfaces studied by AC surface photovoltage techniques

Hirofumi Shimizu, Chusuke Munakata

Author Affiliations +

Proceedings Volume 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II; (1998) https://doi.org/10.1117/12.324397
Event: Microelectronic Manufacturing, 1998, Santa Clara, CA, United States

Abstract

An ac surface photovoltage, which is excited by a chopped photon beam in a semiconductor, is successfully applied for nondestructive detection of metallic contaminants on silicon wafer surfaces. In this report, the charge-induced phenomena at Si wafer surfaces due to various impurities and the mechanism are summarized. Metal (trivalent Al and Fe)- induced negative charges have been proposed at the top region of thermal oxide on the basis of the generally accepted oxide charge model.

Citation Download Citation

Hirofumi Shimizu and Chusuke Munakata "Basic approaches for metal-induced oxide charge on silicon wafer surfaces studied by AC surface photovoltage techniques", Proc. SPIE 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II, (27 August 1998); https://doi.org/10.1117/12.324397

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available