A hinged-pad test structure for sliding friction measurement in micromachining

Maarten P. de Boer; James M. Redmond; Terry A. Michalske

doi:10.1117/12.324066

1 September 1998 A hinged-pad test structure for sliding friction measurement in micromachining

Maarten P. de Boer, James M. Redmond, Terry A. Michalske

Proceedings Volume 3512, Materials and Device Characterization in Micromachining; (1998) https://doi.org/10.1117/12.324066
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

We describe the design, modeling, fabrication and initial testing of a new test structure for friction measurement in MEMS. The device consists of a cantilevered forked beam and a friction pad attached via a hinge. Compared to previous test structures, the proposed structure can measure friction over much larger pressure ranges, yet occupies one hundred times less area. The placement of the hinge is crucial to obtaining a well-known and constant pressure distribution in the device. Static deflections on the device were measured and modeled numerically. Preliminary results indicate that friction pad slip is sensitive to friction pad normal force.

Citation Download Citation

Maarten P. de Boer, James M. Redmond, and Terry A. Michalske "A hinged-pad test structure for sliding friction measurement in micromachining", Proc. SPIE 3512, Materials and Device Characterization in Micromachining, (1 September 1998); https://doi.org/10.1117/12.324066

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