Long-term stability of membrane transducers for proximity sensing

Mark Hornung; Oliver Brand; Oliver Paul; Henry Baltes

doi:10.1117/12.323896

8 September 1998 Long-term stability of membrane transducers for proximity sensing

Mark Hornung, Oliver Brand, Oliver Paul, Henry Baltes

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323896
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

We report on the long-term stability of micromachined silicon membrane resonators for ultrasound based object detection and proximity sensing. The proximity sensor system measures distances up to 10 cm using either a phase or an acoustic Fabry-Perot measurement method. In these applications the transducer elements are continuously excited at their fundamental resonance using the thermomechanical excitation principle. The success of the sensor system depends on the reliability and stability of the micromachined devices, which are fabricated using an industrial pressure sensor process.

Citation Download Citation

Mark Hornung, Oliver Brand, Oliver Paul, and Henry Baltes "Long-term stability of membrane transducers for proximity sensing", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323896

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