MEMS-based resonating xylophone bar magnetometers

Dennis K. Wickenden; Robert B. Givens; Robert Osiander; John L. Champion; Douglas A. Oursler; Thomas J. Kistenmacher

doi:10.1117/12.323908

8 September 1998 MEMS-based resonating xylophone bar magnetometers

Dennis K. Wickenden, Robert B. Givens, Robert Osiander, John L. Champion, Douglas A. Oursler, Thomas J. Kistenmacher

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323908
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

A novel magnetometer which utilizes the Lorentz force to measure vector magnetic fields has recently been described. The device, based on a classical resonating xylophone bar, has an extremely wide dynamic range and is ideally suited to miniaturization using a variety of technologies. The overall dimensions of the xylophone bar are limited by the width of the nodal supports which act as current electrodes and ultimately govern the resonance qualities. Minimum xylophone lengths of 10 and 5 mm mare attainable by electrostatic discharge machining and chemical milling of metal foils, respectively. Significantly smaller devices are achievable using polycrystalline silicon-based MEMS processing. However, the sheet resistivity of the silicon restricts the drive current through the xylophone bar and thus limits the sensitivity. This sensitivity can potentially by regained by replacing the silicon xylophone bar with a metal/piezoelectric/metal sandwich structure.

Citation Download Citation

Dennis K. Wickenden, Robert B. Givens, Robert Osiander, John L. Champion, Douglas A. Oursler, and Thomas J. Kistenmacher "MEMS-based resonating xylophone bar magnetometers", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323908

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