Two-axis detection resonant accelerometer based on rigidity change

Osamu Tabata; Takeshi Yamamoto

doi:10.1117/12.323888

8 September 1998 Two-axis detection resonant accelerometer based on rigidity change

Osamu Tabata, Takeshi Yamamoto

Proceedings Volume 3514, Micromachined Devices and Components IV; (1998) https://doi.org/10.1117/12.323888
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

We propose a design of a 2-axis resonant accelerometer with high-quality and low-cost based on a new detection principle, which can be realized by a surface micromachining technology. The detection principle is based on frequency change that is induced by rigidity changes in the resonator. The sensor consists of four parallel-beam resonators, four folded-beam springs, and a square mass. Each resonator is driven by a first bending mode in the X-Y plane. The feasibility of this sensing principle was confirmed by a macro model of a parallel-beam resonator. The FEM analysis revealed that a frequency change rate of 1.55% (X-direction) and 0.74% (Y-direction) were realized when 5G acceleration was applied, and the optimum beam gap was determined.

Citation Download Citation

Osamu Tabata and Takeshi Yamamoto "Two-axis detection resonant accelerometer based on rigidity change", Proc. SPIE 3514, Micromachined Devices and Components IV, (8 September 1998); https://doi.org/10.1117/12.323888

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