Measurement for both vibration and deformation of microsurface by Fizeau interferometer of composite self-focus rod sensor

Hai Ming; Xiaohong Sun; Ming Bai; Zhongcheng Liang; Guoping Zhang; Hui Li; Yunxia Wu; Jiangping Xie; Jizu Shu

doi:10.1117/12.318154

13 August 1998 Measurement for both vibration and deformation of microsurface by Fizeau interferometer of composite self-focus rod sensor

Hai Ming, Xiaohong Sun, Ming Bai, Zhongcheng Liang, Guoping Zhang, Hui Li, Yunxia Wu, Jiangping Xie, Jizu Shu

Author Affiliations +

Proceedings Volume 3555, Optical and Fiber Optic Sensor Systems; (1998) https://doi.org/10.1117/12.318154
Event: Photonics China '98, 1998, Beijing, China

Abstract

By using composite self-focus rod, LD-pumped frequency doubling Nd:YVO₄ laser and 3D fine regulation stand, a new Fizeau-type interferometer is developed. It can apply to measuring the micro-vibration and deformation of micro- surface at the same time. The theoretical analysis and the experimental results for the interferometer of self-focus sensor are given.

Citation Download Citation

Hai Ming, Xiaohong Sun, Ming Bai, Zhongcheng Liang, Guoping Zhang, Hui Li, Yunxia Wu, Jiangping Xie, and Jizu Shu "Measurement for both vibration and deformation of microsurface by Fizeau interferometer of composite self-focus rod sensor", Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); https://doi.org/10.1117/12.318154

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available