1.06-um laser irradiation on high-reflection coatings inside a scanning electron microscope

Marc Poulingue; Jean Dijon; Pierre Garrec; Philippe Lyan

doi:10.1117/12.344401

7 April 1999 1.06-μm laser irradiation on high-reflection coatings inside a scanning electron microscope

Marc Poulingue, Jean Dijon, Pierre Garrec, Philippe Lyan

Proceedings Volume 3578, Laser-Induced Damage in Optical Materials: 1998; (1999) https://doi.org/10.1117/12.344401
Event: Laser-Induced Damage in Optical Materials: 1998, 1998, Boulder, CO, United States

Abstract

The output fluence of a high peak power laser like the French laser project 'Laser Megajoule' is strongly related to the damage threshold of mirrors and polarizers consisting of multilayer dielectric coatings. It has been recognized for a long time that growth defects as nodules are playing a significant role in 1.06 micrometers laser damage of these components. In order to determine the critical parameters of the nodule and the associated mechanisms during the laser damage process, we have performed laser irradiation of samples inside the vacuum chamber of a scanning electron microscope (SEM). The SEM allows us to choose a particular area of the sample and to observe it before and after irradiation at a micro size scale. The damage evolution ca be analyzed shot by shot. In this paper, the experimental method is described. SEM pictures of irradiated laser shots are showed. Data about damage mechanisms are derived from these very high resolution morphological observations.

Citation Download Citation

Marc Poulingue, Jean Dijon, Pierre Garrec, and Philippe Lyan "1.06-μm laser irradiation on high-reflection coatings inside a scanning electron microscope", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); https://doi.org/10.1117/12.344401

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