Characterization of absorption and scatter losses on optical components for ArF excimer lasers

Klaus R. Mann; Oliver Apel; Eric Eva

doi:10.1117/12.344455

7 April 1999 Characterization of absorption and scatter losses on optical components for ArF excimer lasers

Klaus R. Mann, Oliver Apel, Eric Eva

Proceedings Volume 3578, Laser-Induced Damage in Optical Materials: 1998; (1999) https://doi.org/10.1117/12.344455
Event: Laser-Induced Damage in Optical Materials: 1998, 1998, Boulder, CO, United States

Abstract

The performance of DUV optical components is assessed by measuring both absorption and scatter losses during ArF excimer laser irradiation. Absolute absorptance is determined by employing a high-resolution calorimetric technique which provides greatly enhanced sensitivity compared to transmissive measurements. Thus, the determination of single and two-photon absorption coefficients at energy densities of several 10 mJ/cm² is accomplished. As a result of its sensitivity, UV laser calorimetry can be also employed for fast monitoring of laser induced aging phenomena like color center formation in fused silica or CaF₂. For monitoring of the scatter losses in UV optics, a total scattering setup was recently installed, using an ArF excimer laser as pulsed 193nm light source and a Coblentz hemisphere as integrating element. Results of quantitative absorption and scatter measurements at 193 and 248 nm are presented for coated and uncoated optics, and the contribution of the various loss channels is discussed.

Citation Download Citation

Klaus R. Mann, Oliver Apel, and Eric Eva "Characterization of absorption and scatter losses on optical components for ArF excimer lasers", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); https://doi.org/10.1117/12.344455

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available