Rutherford backscattering spectroscopy analysis of Au/Cr/GaAs

D. Pantelica; F. Negoita; Rodica V. Ghita; D. Cengher; S. Lazanu

doi:10.1117/12.344446

7 April 1999 Rutherford backscattering spectroscopy analysis of Au/Cr/GaAs

D. Pantelica, F. Negoita, Rodica V. Ghita, D. Cengher, S. Lazanu

Proceedings Volume 3578, Laser-Induced Damage in Optical Materials: 1998; (1999) https://doi.org/10.1117/12.344446
Event: Laser-Induced Damage in Optical Materials: 1998, 1998, Boulder, CO, United States

Abstract

The thermal stability for rapid thermal annealing of Cr/GaAs, Au/GaAs and Au/Cr/GaAs system was investigated using Rutherford backscattering spectroscopy technique. No interdiffusion could be detected in Cr/GaAs and Au/Cr/GaAs systems for low temperature (400°C) rapid thermal annealing. In the Au/GaAs system, Au diffusion and Ga outdiffusion to the surface was observed and a quantitative analysis of the transport of Au in GaAs using RUMP code was performed. A value of D = 1. 1012 cm2/sec was obtained for the diffusion coefficient of Au in GaAs at 400°C. This analysis is related to an attempt of improving the metallization procedure for laser diodes with the active region close to the surface. keywords: rapid thermal annealing, Rutherford backscattering spectroscopy, diffusion, RUMP code.

Citation Download Citation

D. Pantelica, F. Negoita, Rodica V. Ghita, D. Cengher, and S. Lazanu "Rutherford backscattering spectroscopy analysis of Au/Cr/GaAs", Proc. SPIE 3578, Laser-Induced Damage in Optical Materials: 1998, (7 April 1999); https://doi.org/10.1117/12.344446

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available