Cost analysis on the next-generation lithography technology

Yoshio Gomei

doi:10.1117/12.351075

25 June 1999 Cost analysis on the next-generation lithography technology

Yoshio Gomei

Proceedings Volume 3676, Emerging Lithographic Technologies III; (1999) https://doi.org/10.1117/12.351075
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

A cost of ownership (CoO) model is used to analyze the cost of the next generation lithography (NGL) technology which includes proximity x-ray, ion beam projection (IPL), EUV and SCALPEL. The model takes into account the equipment cost, throughput, resist/process cost and mask cost. The purpose of this paper is to propose a baseline to discuss on the NGL CoO issue. General conclusion is that x-ray appears to be most cost-effective. This is the case when plural steppers are installed to a storage ring. IPL has to use a certain extent of complementary mask mode which may increase the IPL total cost. EUV appears to require higher throughput to be cost-competitive to other technologies because of expected higher machine and mask costs. SCALPEL may have difficulty to attain competent throughput. The key feature in this case is the electron beam current and the width of a unit exposure field covered by electron beam scanning.

Citation Download Citation

Yoshio Gomei "Cost analysis on the next-generation lithography technology", Proc. SPIE 3676, Emerging Lithographic Technologies III, (25 June 1999); https://doi.org/10.1117/12.351075

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available