Mass separation using thin PTFE membranes

Zeno Rummler; Walter Bacher; Volker Saile; Werner K. Schomburg

doi:10.1117/12.341170

10 March 1999 Mass separation using thin PTFE membranes

Zeno Rummler, Walter Bacher, Volker Saile, Werner K. Schomburg

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341170
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

Devices for mass separation have been engineered and were fabricated using the AMANDA process. The key component is a 5 micrometers thin, semi-permeable PTFE membrane with a circular diameter of 42 mm. The membrane is encapsulated in a PTFE and PEEK housing. In experiments, this novel device separated a gas flow of approximately 1 (mu) l/min from a methanol feed stream of 1 ml/min at a pressure difference of 900 hPa. The separation process was simulated in FE- calculations exploiting analogies between diffusion theory and heat transfer. Mechanical stability and creeping of the PTFE membrane were investigated as well. All parts in contact with the fluids to be separated are made of chemically inert polymers. As a consequence, a welding process had to be developed for bonding the PTFE membrane to the PTFE housing. This was accomplished with an intermediate FEP layer. Extension of this bonding technique to other AMANDA products will facilitate fabrication of chemically inert micropumps, valves, and sensors.

Citation Download Citation

Zeno Rummler, Walter Bacher, Volker Saile, and Werner K. Schomburg "Mass separation using thin PTFE membranes", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341170

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