Microfabrication of biofactory-on-a-chip devices using laser ablation technology

Mark S. Talary; Julian P.H. Burt; Nadeem Hasan Rizvi; Phil T. Rumsby; Ron Pethig

doi:10.1117/12.341248

10 March 1999 Microfabrication of biofactory-on-a-chip devices using laser ablation technology

Mark S. Talary, Julian P.H. Burt, Nadeem Hasan Rizvi, Phil T. Rumsby, Ron Pethig

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341248
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

In recent years, microfabrication techniques derived from existing expertise in the microelectronics industry have been applied to the fields of biotechnology and clinical diagnostics. In this work, 'Biofactory-on-a-chip' devices are being developed to demonstrate how these microfabrication techniques can be combined with electrokinetic phenomena to manipulate, separate and characterize biological material using non-uniform electric fields. Excimer laser ablation methods have been used to fabricate these devices. Key to the successful fabrication and functioning of 'Biofactory' devices is the ability to: machine microelectrodes with micrometer feature sizes over a large area; create via-holes in insulating layers to form electrical interconnects in multilayer structures; fabricate shaped microfluidic channels; and control alignment in the device production with micron accuracy.

Citation Download Citation

Mark S. Talary, Julian P.H. Burt, Nadeem Hasan Rizvi, Phil T. Rumsby, and Ron Pethig "Microfabrication of biofactory-on-a-chip devices using laser ablation technology", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341248

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