Opto-micro-mechanical superresolution detector system

Rainer Riesenberg; Thomas Seifert; Alexander Berka; Ulrich Dillner

doi:10.1117/12.360031

27 August 1999 Opto-micro-mechanical superresolution detector system

Rainer Riesenberg, Thomas Seifert, Alexander Berka, Ulrich Dillner

Proceedings Volume 3737, Design and Engineering of Optical Systems II; (1999) https://doi.org/10.1117/12.360031
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

Often the digital resolution of optical systems is limited by the size of the pixels of detector arrays. To increase this lateral resolution an architecture with a new spatial light modulator is presented. A microstripe is moved across a detector. The microstripe shades off a small part of the detector surface thus providing an inverse opto- micromechanical scanning. Additional virtual subpixels are generated. The lateral resolution of the detector increases by the number of lateral shifts, which is experimentally demonstrated up to factor of 30. The concept includes a throughput or multiplex advantage. For enhanced resolution the signal to noise ratio nearly does not decrease in the case of thermal like noise. The microstripe array is prepared by micromachining technology, the thickness of the stripes is 1...2 micrometers , the width is 3 micrometers ...1 mm and length is up to 2 mm.

Citation Download Citation

Rainer Riesenberg, Thomas Seifert, Alexander Berka, and Ulrich Dillner "Opto-micro-mechanical superresolution detector system", Proc. SPIE 3737, Design and Engineering of Optical Systems II, (27 August 1999); https://doi.org/10.1117/12.360031

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KEYWORDS

Sensors

Signal to noise ratio

Image resolution

Detector arrays

Signal detection

Staring arrays

Resolution enhancement technologies

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