Surface shape measurement using a wavelength-scanning Fizeau interferometer

Akihiro Yamamoto; Ichirou Yamaguchi; Masaru Yano

doi:10.1117/12.347758

7 May 1999 Surface shape measurement using a wavelength-scanning Fizeau interferometer

Akihiro Yamamoto, Ichirou Yamaguchi, Masaru Yano

Proceedings Volume 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99); (1999) https://doi.org/10.1117/12.347758
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '99), 1999, Yokohama, Japan

Abstract

We have developed a wavelength scanning Fizeau interferometer for surface profilometry. This interferometer is free from ambiguity of the sign of the resultant profile. It is more compact and robust for disturbance such as vibration than the Michelson interferometer used previously. Experimental results from a step and a dip on mirror surfaces are shown. We could measure a step 1.1 mm high. We also could map a part of a coin but with a noisy result. Origins of the noises are also discussed.

Citation Download Citation

Akihiro Yamamoto, Ichirou Yamaguchi, and Masaru Yano "Surface shape measurement using a wavelength-scanning Fizeau interferometer", Proc. SPIE 3740, Optical Engineering for Sensing and Nanotechnology (ICOSN '99), (7 May 1999); https://doi.org/10.1117/12.347758

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