Spectral characteristics of filters and semiconductor devices for wavelength metrology

Frank Bitte; Tilo Pfeifer

doi:10.1117/12.357741

13 August 1999 Spectral characteristics of filters and semiconductor devices for wavelength metrology

Frank Bitte, Tilo Pfeifer

Proceedings Volume 3744, Interferometry '99: Techniques and Technologies; (1999) https://doi.org/10.1117/12.357741
Event: International Conference on Optical Metrology, 1999, Pultusk Castle, Poland

Abstract

Wavelength measurements with Michelson interferometers have major disadvantages of high costs and low measurement rates. The paper shows two alternative methods for wavelength measurement of monochromatic light that are based on spectral characteristics of optical components. The methods are illustrated for interference filters and double photodiodes.

Citation Download Citation

Frank Bitte and Tilo Pfeifer "Spectral characteristics of filters and semiconductor devices for wavelength metrology", Proc. SPIE 3744, Interferometry '99: Techniques and Technologies, (13 August 1999); https://doi.org/10.1117/12.357741

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