Submicron regular structures formed by nanosecond laser intracavity treatment

Vasily V. Valyavko; Vladimir P. Osipov

doi:10.1117/12.364236

20 September 1999 Submicron regular structures formed by nanosecond laser intracavity treatment

Vasily V. Valyavko, Vladimir P. Osipov

Proceedings Volume 3822, Computer-Controlled Microshaping; (1999) https://doi.org/10.1117/12.364236
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

The one-pulse intracavity processing of the solid-state surface by the radiation of the 150-ns TEA carbon dioxide laser allowed to form the system of supernarrow (less than 0.3 micrometer) equidistant parallel grooves on thin metallic films, evaporated on glass substrates. Later, the more complicated structures, looking as the grids and the regular systems of submicron hollows, were formed by means of only one laser pulse on the basis of the modified laser resonator. The final view of the system of microstructures, which can be formed by the intracavity method, substantially depends on the laser resonator parameters as well the characteristics of the laser impulse (energy, wavelength, duration, mode structure, etc.).

Citation Download Citation

Vasily V. Valyavko and Vladimir P. Osipov "Submicron regular structures formed by nanosecond laser intracavity treatment", Proc. SPIE 3822, Computer-Controlled Microshaping, (20 September 1999); https://doi.org/10.1117/12.364236

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