Solid state gas microsensors for environmental and industrial monitoring

Robin M. Walton; Richard E. Cavicchi; Stephen Semancik; Balaji Panchapakesan; Don L. DeVoe; Maria I. Aquino-Class; James D. Allen; John S. Suehle

doi:10.1117/12.372861

21 December 1999 Solid state gas microsensors for environmental and industrial monitoring

Robin M. Walton, Richard E. Cavicchi, Stephen Semancik, Balaji Panchapakesan, Don L. DeVoe, Maria I. Aquino-Class, James D. Allen, John S. Suehle

Author Affiliations +

Proceedings Volume 3853, Environmental Monitoring and Remediation Technologies II; (1999) https://doi.org/10.1117/12.372861
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

We describe solid state gas microsensor array technology for real-time, low-cost environmental and industrial monitoring. The four-element, surface-micromachined arrays are designed in CMOS technology and consist of multiple platforms called 'microhotplates.' Each microhotplate can be individually addressed, and includes functionality for rapid control and measurement of sensor temperature and gas-induced changes in a sensing film's electrical properties. The array elements can be tuned for specific analytes, by choice of sensing material and the temperature-programs applied, in order to better meet the needs of a particular application. Tin oxide was used as the base sensing material for microhotplates used in these studies. Tin oxide is grown selectively on each individual element within the arrays using a chemical vapor deposition process involving thermal decomposition of tetramethyltin in an argon and oxygen ambient. Catalytic additives, such as Pt, Pd and Cu are surface-dispersed to make the films more selective and sensitive. Detection capabilities for the low power microhotplate sensing technology are being established for target analytes in ambients that are relevant to process control, environmental measurements, and vapor-related remediation studies. We describe the use of these micromachined arrays to detect approximately ppm levels of methanol, benzene and hydrogen in ambient air and to produce analyte-specific signatures using temperature programs, T(t).

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Robin M. Walton, Richard E. Cavicchi, Stephen Semancik, Balaji Panchapakesan, Don L. DeVoe, Maria I. Aquino-Class, James D. Allen, and John S. Suehle "Solid state gas microsensors for environmental and industrial monitoring", Proc. SPIE 3853, Environmental Monitoring and Remediation Technologies II, (21 December 1999); https://doi.org/10.1117/12.372861

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KEYWORDS

Sensors

Microsensors

Hydrogen

Oxides

Platinum

Temperature metrology

Chemical elements

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