Measurement system for the parameters of integrated optical film

Zhiguo Tan; Zhene Xu; Qingsong Wu; Shimin Li; Qiong Xie

doi:10.1117/12.361134

8 September 1999 Measurement system for the parameters of integrated optical film

Zhiguo Tan, Zhene Xu, Qingsong Wu, Shimin Li, Qiong Xie

Proceedings Volume 3862, 1999 International Conference on Industrial Lasers; (1999) https://doi.org/10.1117/12.361134
Event: International Symposium on Industrial Lasers, 1999, Wuhan, China

Abstract

The refractive index and the thickness of integrated optical film, due to its small size, are difficult to measure without understanding of the nature of light in the guiding medium. Popular method used to measure these two parameters is based on ellipsometry. We herein demonstrate an innovative measurement system based on the prism-coupling. We have contrasted the traditional method with this new measurement system. The principle and setup of this design are illustrated. The theorized value and simulation results are presented.

Citation Download Citation

Zhiguo Tan, Zhene Xu, Qingsong Wu, Shimin Li, and Qiong Xie "Measurement system for the parameters of integrated optical film", Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); https://doi.org/10.1117/12.361134

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