When calibration is not enough

Jeffrey R. Kingsley; Leslie Johnson

doi:10.1117/12.373366

30 December 1999 When calibration is not enough

Jeffrey R. Kingsley, Leslie Johnson

Proceedings Volume 3873, 19th Annual Symposium on Photomask Technology; (1999) https://doi.org/10.1117/12.373366
Event: Photomask Technology and Management, 1999, Monterey, CA, United States

Abstract

When added CD (Critical Dimension) capacity is needed there are several routes that can be taken -- add shifts and people to existing equipment, obtain additional equipment and staff or use an outside service provider for peak and emergency work. In all but the first scenario the qualification of the 'new' equipment, and correlation to the existing measurements, is key to meaningful results. In many cases simply calibrating the new tool with the same reference material or standard used to calibrate the existing tools will provide the level of agreement required. In fact, calibrating instruments using different standards can provide an acceptable level of agreement in cases where accuracy is a second tier consideration. However, there are also situations where factors outside of calibration can influence the results. In this study CD measurements from a mask sample being used to qualify an outside service provider showed good agreement for the narrower linewidths, but significant deviation occurred with increasing CD. In the course of a root cause investigation, it was found that there are a variety of factors that may influence the agreement found between two tools. What are these 'other factors' and how are they found? In the present case the results of a 'round robin' consensus from a variety of tools was used to initially determine which tool needed to be investigated. The instrument parameters felt to be the most important causes of the disagreement were identified and experiments run to test their influence. The factors investigated as the cause of the disagreement included (1) Type of detector and location with respect to sample, (2) Beam Voltage, (3) Scan Rotation/Sample Orientation issues and (4) Edge Detection Algorithm.

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Jeffrey R. Kingsley and Leslie Johnson "When calibration is not enough", Proc. SPIE 3873, 19th Annual Symposium on Photomask Technology, (30 December 1999); https://doi.org/10.1117/12.373366

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KEYWORDS

Sensors

Calibration

Critical dimension metrology

Detection and tracking algorithms

Scanning electron microscopy

Edge detection

Data acquisition

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