3D silicon photonic lattices: cornerstone of an emerging photonics revolution

James G. Fleming; Shawn-Yu Lin

doi:10.1117/12.361218

30 August 1999 3D silicon photonic lattices: cornerstone of an emerging photonics revolution

James G. Fleming, Shawn-Yu Lin

Proceedings Volume 3874, Micromachining and Microfabrication Process Technology V; (1999) https://doi.org/10.1117/12.361218
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

3D photonic lattices are engineered 'materials' which are the photonic analogues of semiconductors. These structures were first proposed and demonstrated in the mid-to-late 1980's. However, due to fabrication difficulties, lattices active in the IR are only just emerging. Wide ranges of structures and fabrication approaches have been investigated. The most promising approaches have been investigated. The most promising approach for many potential applications is a diamond-like structure fabricated using silicon microprocessing techniques. This approach has enabled the fabrication of 3D silicon photonic lattices active in the IR. The structures display band gaps centered from 12(mu) down to 1.55 (mu) .

Citation Download Citation

James G. Fleming and Shawn-Yu Lin "3D silicon photonic lattices: cornerstone of an emerging photonics revolution", Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); https://doi.org/10.1117/12.361218

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available